Abstract: This article presents an ultrasonic gas meter based on a scandium-doped aluminum nitride (Sc0.2Al0.8N) piezoelectric micromachined ultrasonic transducer (PMUT) array, where the ...
Abstract: This paper presents high fill-factor piezoelectric micromachined ultrasonic transducer (PMUT) arrays fabricated via a novel process using cavity SOI wafers. The simple three-mask fabrication ...
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